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We describe a new O-ring setup for wet-etching processes of microelectromechanical systems (MEMS) . Our new low-cost approach using siloxane-based seal rings entails the single-side etching of silicon and silicon dioxide using potassium hydroxide and buffe ...
We have measured in-situ Raman spectra of aluminosilicate glasses and liquids with albite (NaAl-Si3O8) and anorthite (CaAl2Si2O8) compositions at high temperatures, through their glass transition range up to 1700 and 2000 K, respectively. For these experim ...
Using a first-principles approach, we characterize P-b-type defects at Si-SiO2 interfaces by calculating hyperfine parameters for several relaxed structural models. Application to the Pb center at the Si(111)-SiO2 interface, for which the atomic structure ...
Using a first-principles approach, we study the vibrational properties of vitreous SiO2 which are measured in neutron-scattering experiments. We adopt a model structure consisting of corner-sharing tetrahedra, which was previously generated using first-pri ...
An Sb/Si(lll)root 3x root3 surface has been studied by high-resolution core-level spectroscopy. All the components of the Si 2p core level related to the clean surface have disappeared, and one strong Sb-induced component could be identified at a binding e ...
Stable negative ions containing up to sixteen silicon atoms have been measured by mass spectrometry in RF power-modulated silane plasmas for amorphous silicon deposition. These hydrogenated silicon cluster ions reach much higher masses than the positive io ...
The behavior of alpha-quartz under hydrostatic and nonhydrostatic high-pressure conditions has been investigated in molecular dynamics simulations of silica in order to clarify the role of nonhydrostatic stresses in the amorphization process. It is shown t ...
The dramatic enhancement of the silicon room-temperature oxidation rate by a Na overlayer has been attributed to the spectator catalytic action of the alkali metal. In contrast, we show evidence that Na participates in the oxidation process binding an oxyg ...
Thin silicon dioxide films nitrided in N2O by rapid thermal processing (RTP) or in a classical furnace were investigated by x-ray photoelectron spectroscopy, secondary ion mass spectroscopy, and electrical measurements on metal-oxide-semiconductor capacito ...