Concept

Self-aligned gate

Publications associées (239)

Technology and performance of InAlN/AlN/GaN HEMTs with gate insulation and current collapse suppression using ZrO2 or HfO2

Nicolas Grandjean, Jean-François Carlin, Eric Feltin, Marcus Gonschorek

We present the technology and performance of InAlN/AlN/GaN MOS HEMTs with gate insulation and surface passivation using ZrO2 or HfO2. About 10-nm-thick high-k dielectrics were deposited by MOCVD before the ohmic contact processing. Plasma pretreatment allo ...

2008

Electrical properties of functionalized nanowire field effect transistors

Ralf Thomas Weitz

The utilization of functional organic materials holds great promise for applications in electronic devices. Semiconducting organic molecules are frequently used as channel material in field effect transistors, due to the ease by which they can be assembled ...

EPFL2008

Effect of anodic oxidation on the characteristics of lattice-matched AlInN/GaN heterostructures

Nicolas Grandjean, Jean-François Carlin, Eric Feltin

The effect of anodic oxidation on the electronic characteristics of lattice-matched AlInN/GaN heterostructures was investigated using field-effect transistor (FET) structures with the gate areas in direct contact with the electrolytes. The gate surface of ...

2008

Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

In this paper, we study the localized deposition of ZnO micro and nanostructures deposited by non-reactive rf-magnetron sputtering through a stencil mask on ultra-thin (10 nm) SiO2 layers containing a single plane of silicon nanocrystals (NCs), synthetized ...

2008

Three-dimensional Tip Electrode Array Technology for High Resolution Neuro-Electronic System used in Electrophysiological Experiments in-vitro

Alexandre Schmid, Yusuf Leblebici, Neil Joye, Maurizio Lavagnino

A three-dimensional tip electrode array technology for in- vitro electrophysiological experiments is presented. Based on simulation results obtained with a finite element model of the neuron-electrode interface, it has been shown that the electrical coupli ...

2008

Fabrication of silicon nano wires and gate-all-around MOS devices

Didier Bouvet, Kirsten Emilie Moselund

The invention relates to methods for manufacturing semiconductor devices. Processes are disclosed for implementing suspended single crystal silicon nano wires (NWs) using a combination of anisotropic and isotropic etches and spacer creation for sidewall pr ...

2007

Light structuring for massively parallel optical trapping

Johann Rohner

Optical trapping, discovered in the 70's, allows moving and stabilizing small objects which sizes varies from atoms to particles of several microns. This technique, based on momentum conservation, is particularly well suited for manipulating biological mat ...

EPFL2007

Gate insulation and drain current saturation mechanism in InAlN/GaN metal-oxide-semiconductor high-electron-mobility transistors

Nicolas Grandjean, Jean-François Carlin, Eric Feltin, Marcus Gonschorek

The authors investigate 2 mu m gate-length InAlN/GaN metal-oxide-semiconductor high-electron-mobility transistors (MOS HEMTs) with 12 nm thick Al2O3 gate insulation. Compared to the Schottky barrier (SB) HEMT with similar design, the MOS HEMT exhibits a ga ...

2007

Ultra-thin nanograin polysilicon devices for hybrid CMOS-NANO integrated circuits

Serge Ecoffey

The aim of this research is to develop and to evaluate devices and circuits performances based on ultrathin nanograin polysilicon wire (polySiNW) dedicated to room temperature operated hybrid CMOS-"nano" integrated circuits. The proposed polySiNW device is ...

EPFL2007

Above-IC RF MEMS devices for communication applications

Raphaël Fritschi

Wireless communications are showing an explosive growth in emerging consumer and military applications of radiofrequency (RF), microwave, and millimeter-wave circuits and systems. Applications include wireless personal connectivity (Bluetooth), wireless lo ...

EPFL2007

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