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Multilayered niobium oxynitride films were deposited onto (100) Si using DC magnetron sputtering with a reactive gas pulsing process. The argon and nitrogen flows were kept constant during sputtering of a pure niobium target and the oxygen flow was pulsed ...
(001)-textured AIN thin films as needed for longitudinal bulk acoustic wave (BAW) devices exhibit large mechanical stress variations and large orientation variation as a function of growth substrate properties. We prepared thin silicon and silicon dioxide ...
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Diffusion of carbon is the crucial step in chemical vapor deposition (CVD) growth of carbon nanotubes (CNTs) On metal nanoparticles. Using first principles techniques we model the binding and diffusion of carbon atoms and dimers on late transition (Ni, Pd, ...
Barrier film for encapsulation of oxygen and moisture sensitive devices comprising a base polymer substrate and applied onto the base substrate, a barrier layer comprising an inorganic coating deposited by a vapour deposition method, characterised in that ...
The vacuum deposition of complex functional molecules and nanoparticles by thermal sublimation is often hindered due to their extremely low vapor pressure. This especially impedes the application of ultrahigh vacuum (UHV) based analytical and surface modif ...
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer range. Since the beams can be used to locally alter material at the point where they are incident on a surface, they represent direct nanofabrication tools. The aut ...
Pulse plating of nickel-tungsten alloys has been studied from two citrate ammonia based model electrolytes containing either an excess of nickel or an excess of tungsten. The alloy composition and current efficiency were determined for pulse periods rangin ...
The addition of carbon to samples, during transmission electron microscope imaging, presents a barrier to accurate analysis; the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting ...
In the first results of electron Bernstein wave heating (EBWH) via O-X-B double mode conversion in a medium aspect ratio tokamak performed in TCV, the total power absorption efficiency was typically 60% and the deposition was made off-axis to avoid the cen ...
Erbium-doped amorphous aluminum oxide layers deposited on Si or oxidized silicon substrates are promising construction pieces for future monolytic integrated optoelectronics devices. In a novel high-vacuum chemical vapor deposition setup the alumina films ...
