MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
MICRO-504: Photonic micro- and nanosystemsThis course aims at providing engineering and design guidelines for selected Photonic Micro- and Nanosystems. In particular, Optical MEMS and Integrated Photonics are reviewed. Standard fabrication pr
