Concept

Sputter deposition

Publications associées (588)

Fabrication and characterization of metal nanolevers made by shadow mask technology

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

The evaporation through shadow masks (nanostencils) overcomes the limitations typically given by the patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. It allows making low-cost nanop ...

2004

Complex Oxide Nanostructures by Pulsed Laser Deposition through Nanostencils

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

A flexible method for simultaneous nanoscale structures fabrication and patterning is described, using a combination of stencil mask and pulsed-laser deposition (PLD) techniques. A miniature shadow-mask with nano-apertures in a very thin microfabricated me ...

2004

Exploring microstencils for sub-micron patterning using pulsed laser deposition

Jürgen Brugger, Johannes Steen

The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 mum down to 500 nm. Strontium titanate (SrTiO3), ...

2004

Nucleation and growth of ultrathin pentacene films on silicon dioxide: effect of deposition rate and substrate temperature

Frank Nüesch, Libero Zuppiroli

We report on a study of pentacene thin-films grown by high vacuum deposition on silicon dioxide, using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The nucleation density of pentacene islands on SiO2is found to rise ...

Elsevier2004

Longueur de diffusion de spin et magnétisme de structures nanotubes de carbone / matériaux ferromagnétiques

Xavier Hoffer

The aim of this thesis work is to study the spin-dependent transport in multiwalled carbon nanotubes (MWNT). To do so, the electrical resistance of MWNT contacted between ferromagnetic electrodes has been measured, as a function of the contacts magnetic co ...

EPFL2004

Large area deposition in high vacuum with high thickness uniformity

Patrik Willi Hoffmann, Simone Amorosi, Giacomo Benvenuti

The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure ...

2004

Epitaxial laser treatment of single crystal nickel-base superalloys

Sélim Mokadem

The continued drive for increased efficiency, performance and reduced costs for aircraft and industrial gas turbines demands extended use of high temperature materials, such as single crystal nickel based superalloys. The cost for hot section components us ...

EPFL2004

Piezoelectric thin films for bulk acoustic wave resonator applications

Roman Lanz

Bandpass filters for microwave frequencies realized with thin film bulk acoustic wave resonators (FBAR) are a promising alternative to current dielectric or surface acoustic wave filters for use in mobile telecommunication applications. With equivalent per ...

EPFL2004

Novel monolithic electrochemically promoted catalytic reactor for environmentally important reactions

Christos Comninellis, György Foti

A novel dismantlable monolithic-type electrochem. promoted catalytic reactor and "smart" sensor-catalytic reactor unit has been constructed and tested for hydrocarbon oxidn. and NO redn. by C2H4 in presence of O2. In this novel reactor, thin (.apprx.20-4 ...

2004

RGD-containing peptide GCRGYGRGDSPG reduces enhancement of osteoblast differentiation by poly(L-lysine)-graft-poly(ethylene glycol)-coated titanium surfaces

Jeffrey Alan Hubbell

Osteoblasts exhibit a more differentiated morphol. on surfaces with rough microtopogs. Surface effects are often mediated through integrins that bind the RGD motif in cell attachment proteins. Here, we tested the hypothesis that modulating access to RGD bi ...

2004

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