Cours
MICRO-332(b): Manufacturing DLLs (printemps)
Résumé
The goal of this DLL is to introduce students to both the practical aspects of micro-fabrication of a fully functional device.
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Enseignants (5)
Jürgen Brugger
I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Martinus Gijs
Martin A.M. Gijs received his degree in physics in 1981 from the Katholieke Universiteit Leuven, Belgium and his Ph.D. degree in physics at the same university in 1986. He joined the Philips Research Laboratories in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked there on micro-and nano-fabrication processes of high critical temperature superconducting Josephson and tunnel junctions, the microfabrication of microstructures in magnetic multilayers showing the giant magnetoresistance effect, the design and realisation of miniaturised motors for hard disk applications and the design and realisation of planar transformers for miniaturised power applications. He joined EPFL in 1997. His present interests are in developing technologies for novel magnetic devices, new microfabrication technologies for microsystems fabrication in general and the development and use of microsystems technologies for microfluidic and biomedical applications in particular.
Yves Bellouard
Dr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing. He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. For his PhD work, he received the Omega Scientific prize (2001) for outstanding contribution in the field of microengineering for his work on Shape Memory Alloys. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials. From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems'). In 2013, he received a prestigious ERC Starting Grant (Consolidator-2012) from the European Research Council and a JSPS Fellowship from the Japan Society for the Promotion of Science. His current research interests are on new paradigms for system integration at the microscale and in particular laser-based methods to tailor material properties for achieving higher level of integration in microsystems, like for instance integrating optics, mechanics and fluidics in a single monolith. These approaches open new opportunities for direct-write methods of microsystems (3D printing). Personal website
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