Publications de Sandra Schweizer

Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...

Institute of Electrical and Electronics Engineers2002

MEMS infrared gas spectrometer based on a porous silicon tunable filter

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...

2001

Thermally actuated micro-mirror for one and two-dimensional optical beam scanning

Sandra Schweizer

EPFL2001

MEMS spectrometer for infrared gas analysis based on a tunable filter of porous silicon

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. It contains a tunable optical filter of porous silicon that allows to measure the infrared absorption of a gas mixture at different wavelengths serially with only ...

2001

Two-dimensional thermally actuated optical microprojection

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular moti ...

2000

Thermally actuated optical microscanner with large angle and low consumption

Philippe Renaud, Sandra Schweizer

A monolithic silicon integrated optical micro-scanner is presented. The device consists of a mirror located on the tip of a thermal bimorph actuator beam. The fabrication process is very simple and compatible with IC fabrication techniques. The device is e ...

1999