Personne

Alan Howling

Publications associées (93)

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Generation of Whistler-Wave Heated Discharges with Planar Resonant rf Networks

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne

Magnetized plasma discharges generated by a planar resonant rf network are investigated. A regime transition is observed above a magnetic field threshold, associated with rf waves propagating in the plasma and which present the characteristics of whistler ...

Amer Physical Soc2013

Low ion energy RF reactor using an array of plasmas through a grounded grid

Christoph Hollenstein, Alan Howling, Michaël Chesaux

A reactor using localized remote plasma in a grid electrode is presented in this study. The aim is to reduce the ion bombardment energy inherent in RF capacitively coupled parallel plate reactors used to deposit large area thin film silicon solar cells. Hi ...

A V S Amer Inst Physics2013

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The interplay of gas flow and depletion by plasma dissociation determines the spatial distribution of species and the deposition uniformity in a plasma source. Many plasma reactors use a gas showerhead and the design of the flow dynamics is a critical aspe ...

2012

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A planar antenna operating at 13.56MHz is presented for potential applications in plasma processing. It consists of interconnected elementary resonant meshes composed of inductive and capacitive elements. Due to its structure, the antenna exhibits a set of ...

2012

Resonant planar antenna as an inductive plasma source

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne, Sylvain Lecoultre

A resonant planar antenna as an inductive plasma source operating at 13.56 MHz inside a low pressure vacuum vessel is presented for potential plasma processing applications. Its principle consists in interconnecting elementary resonant meshes composed of i ...

2012

Radio frequency breakdown between structured parallel plate electrodes with a millimetric gap in low pressure gases

Christoph Hollenstein, Alan Howling, Boris Legradic

This paper presents an investigation into radio frequency (rf) breakdown for electrodes with holes or protrusions, approximating the situation in real reactors and providing a benchmark for fluid simulations. rf breakdown curves (voltage versus pressure) g ...

American Institute of Physics2010

Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition

Christoph Hollenstein, Alan Howling, Raffaello Sobbia

Plasma conditions for microcrystalline silicon deposition generally require a high flux of atomic hydrogen, relative to SiH alpha=0 -> 3 radicals, on the growing film. The necessary dominant partial pressure of hydrogen in the plasma is conventionally obta ...

American Vacuum Society2010

Input silane concentration effect on the a-Si:H to μc-Si:Hμc-Si:H transition width

Christophe Ballif, Christoph Hollenstein, Alan Howling, Grégory Bugnon, Andrea Feltrin, Benjamin Strahm, Fanny Sculati-Meillaud

In this work the microstructure transition width from amorphous to microcrystalline silicon is discussed. It is shown that the width of the transition depends on the input silane concentration level and indirectly on the silane depletion level. The higher ...

Elsevier2010

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Plasma diagnostics for large area, industrial RF parallel-plate reactors can be useful for process optimization and monitoring, provided that their implementation is practical and non-intrusive. For instance, Fourier transform infrared (FTIR) absorption sp ...

Elsevier2009

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2008