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Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional thermal model to simulate the crystallization proc ...
We report the growth of vertically aligned single-wall and multi-wall carbon nanotube forest using a Laser Activated – Catalytic Chemical Vapor Deposition process. The experiments were performed in a cold-wall reactor filled with an ethylene-hydrogen-argon ...
One important challenge of microsystems design is the implementation of miniaturized actuation principles efficient at the micro-scale. Shape memory alloys (SMAs) have early on been considered as a potential solution to this problem as these materials offe ...
Femtosecond laser pulses used in a regime below the ablation threshold have two noticeable effects on Fused Silica (a-SiO2): they locally increase the material refractive index and modify its HF etching selectivity. The nature of the structural changes ind ...
Digital holographic microscopes using two orthogonal polarized reference waves provides real-time polariscopes. Birefringence induced by internal stress is imaged in optical fibers and in fused silica substrates, where lines are written with low-energy fem ...
One important challenge of microsystems design is the implementation of miniaturized actuation principles efficient at the micro-scale. Shape memory alloys (SMAs) have early on been considered as a potential solution to this problem as these materials offe ...
Low energy femtosecond laser pulses locally increase the refractive index and the hydro-fluoric acid etching rate of fused silica. These phenomena form the basis of a direct-write method to fabricate integrated glass devices that are of particular interest ...
Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction and modify the material chemical selectivity. Regions that have been exposed to the laser are etched hundred fold faster than unex ...
Femtosecond laser irradiation has various noticeable effects on fused silica. Of particular interest, pulses with energy levels below the ablation threshold can locally increase the refractive index and the material etching selectivity to hydrofluoric acid ...
We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are pr ...
