Florian Calame, Paul Muralt
A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped with interdigitated electrodes to achieve higher voltages. A coupling constant k(2)=5% was derived from the difference in resonance frequencies at low and high impedance. At optimal load impedance, a voltage of 1.6 V and an output power of 1.4 mu W was measured with a 0.8x1.2 mm cantilever having an active area of 0.8x0.4 mm, excited with 2g at 870 Hz.
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009