The adverse health effects of air pollution around the world have been associated with the inhalation of fine particulate matter (PM2.5). Such outcomes are thought to be related to the induction of oxidative stress due to the excess formation of reactive o ...
We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...
We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...
Institute of Electrical and Electronics Engineers2002
We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. It contains a tunable optical filter of porous silicon that allows to measure the infrared absorption of a gas mixture at different wavelengths serially with only ...
A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular moti ...
