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Yttria stabilized zirconia (YSZ) with 8 mol% Y was deposited by reactive magnetron sputtering onto oxidized (100) silicon substrates. It was possible to switch film texture from (111) to (200) by applying a strong RF substrate bias. Transmission electron m ...
A solid oxide fuel cell structure obtainable by selective electrochemical processing, comprising an electrolyte membrane (4) formed by a thin film more than 50nm but less than l0[mu]m thick, covering a supporting structure (1) made of a bulk substrate, the ...
The mass sensitivity of an AlN thin film resonators operated in air at 6-8 GHz has been investigated in theory and experiment. The 30 x 30 mu m wide resonators included a 180-300 nm thick, highly oriented AlN thin film, bottom and top electrode, and an aco ...
Micro-fabricated solid oxide fuel cells (µSOFCs) are finding an increasing interest as potential power sources for portable devices such as MP3 players or laptops. The aim of this work was to fabricate a µSOFC demonstrator that works at 500°C and is fuelle ...
Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H2+CO. An electrochemically deposited nickel grid was used as mec ...
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