Vahid Fakhfouri

Publications associées (12)

À propos
Confidentialité
Mentions légales

Graph Chatbot

An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio Microstructures

Jürgen Brugger, Vahid Fakhfouri

An epoxy-based negative-tone photoresist, which is known as a suitable material for high-aspect-ratio surface micromachining, is functionalized with red-light-emitting CdSe@ZnS nanocrystals (NCs). The proper selection of a common solvent for the NCs and th ...

2007

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Vahid Fakhfouri, Sébastien Jiguet

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...