Publications de Philippe Langlet

Highly Improved Fabrication of Ag and Al Nanostructures for UV and Nonlinear Plasmonics

Olivier Martin, Christian Santschi, Philippe Langlet, Krishnan Thyagarajan

Wiley-V C H Verlag Gmbh2016

All-stencil transistor fabrication on 3D silicon substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Cyrille Hibert, Philippe Langlet, Cristina Martin Olmos, Oscar Vazquez Mena, Katrin Sidler Arnet, Peter Vettiger

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Iop Publishing Ltd2012

Localized Ion Implantation Through Micro/Nanostencil Masks

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Oscar Vazquez Mena, Cristina Martin Olmos, Philippe Langlet

A method is presented that allows the deﬁnition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...

Institute of Electrical and Electronics Engineers2011

Analysis of the blurring in stencil lithography

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Philippe Langlet, Oscar Vazquez Mena, Katrin Sidler Arnet

A quantitative analysis of the blurring and its dependence on the stencil-substrate gap and the deposition parameters in stencil lithography, a high resolution shadow mask technique, is presented. The blurring is manifested in two ways: first, the structur ...

2009

Resistless ion implantation of sub-micron scale features through nano-stencil

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Philippe Langlet, Oscar Vazquez Mena

Resistless ion implantation of sub-micron scale features through nano-stencil ...

2008