Publications de Sébastien Jiguet

Preparation and characterization of SU8-carbon nanotube composites

László Forró, Arnaud Magrez, Sébastien Jiguet, Moshe Judelewicz, Marijana Mionic Ebersold

SU8-carbon nanotube composites have been produced to enhance the mechanical, electrical, and thermal properties of SU8 photoresists. Homogeneous composites materials have been obtained when multiwalled carbon nanotubes (MWCNTs) functionalized with COOH gro ...

2009

SU-8 microfluidic device for scintillating particle detection

Philippe Renaud, Alessandro Mapelli, Sébastien Jiguet, Noelia Vico Triviño

This paper presents the study of a novel scintillation detector based on standard microfabrication techniques. It consists of a fine pitch array of hollow waveguides filled with a liquid scintillator and optically coupled to photodetectors. The detector ha ...

Elsevier2009

Development and studies of a novel microfabricated radiation hard scintillation particle detector with high spatial resolution

Philippe Renaud, Alessandro Mapelli, Sébastien Jiguet

A novel scintillation detector is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by filling microfluidic channels with an organic liquid scintillator. Such a microfluidic device ...

2009

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Vahid Fakhfouri, Sébastien Jiguet

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...

2006

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Vahid Fakhfouri, Sébastien Jiguet

2006

Effect of filler behavior on nanocomposite SU8 photoresist for moving micro- parts

Philippe Renaud, Arnaud Bertsch, Stefano Mischler, Sébastien Jiguet

The use of low-stress SU8 nanocomposites as a functional material for micro- parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of t ...

2006

SU-8 nanocomposite coatings with improved tribological performance for MEMS

Philippe Renaud, Heinrich Hofmann, Arnaud Bertsch, Stefano Mischler, Sébastien Jiguet

The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures. In this work, SU8 photoresist layers rein ...

2006

Conductive SU8 Photoresist for Microfabrication

Philippe Renaud, Heinrich Hofmann, Arnaud Bertsch, Sébastien Jiguet

A conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conducti ...

2005

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