The electromagnetic standing wave effect can become the main source of nonuniformity limiting the use of very high frequency in large area reactors exceeding 1 m(2) required for industrial applications. Recently, it has been proposed and shown experimental ...
Feasibility Study of Shaped Electrode The objective of this project was a feasibility study of a novel, large-area plasma reactor for thin film production, based on a shaped electrode technique ("lens") to compensate the standing wave non-uniformity. Cyli ...
In large-area radio-frequency (rf) capacitive reactors, the redistribution of rf current to maintain current continuity near asymmetric sidewalls causes a perturbation in rf plasma potential to propagate along the resistive plasma between capacitive sheath ...
