Personne

Jürgen Brugger

Publications associées (519)

MEMS-based nanopatterning: new challenges and opportunities for Materials Science

Micro-mechanical systems are exquisite tools for high-resolution surface patterning. As an alternative to traditional photolithography, they can be used for local material deposition at the sub-100 nm scale. This can be either done by means of liquid dispe ...

2006

Tunable surface nanostructures from Block copolymer self-assembly

Jürgen Brugger, Sivashankar Krishnamoorthy, Harry Heinzelmann, Raphaël Pugin

Nanostructures are known to exhibit novel optical, electrical, and magnetic and many other interesting physical properties and a lot of research has been invested on the synthesis and study of such structures in the recent years. The massive drive towards ...

2005

Surface Nanostructuring through block copolymer self-assembly

Jürgen Brugger, Sivashankar Krishnamoorthy, Harry Heinzelmann, Raphaël Pugin

Synthesis of nanostructures using polymer self-assembly methods have gained widespread attention due to the multitude of possibilities they offer and their simple and cost-effective approaches. Self-assembly of block copolymers has been recognized as a pro ...

2005

Micromechanical testing of SU-8 cantilevers

Jürgen Brugger

SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale t ...

2005

Force Spectroscopy with a Novel Small Focus AFM

Jürgen Brugger, Johannes Steen

Atomic force microscopy has become potent tool for investigating interand intramolecular interactions. Single molecule force spectroscopy on supramolecular guest-host-complexes reveal information about the depth of the binding pocket and thermal off-rates. ...

2005

In-situ stabilization of membranes for improved large-area and high-density nanostencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Patterning of micro- and nanometer scale structures by means of nanostencils (shadow masks) is increasingly being used as a simple, clean and low-cost alternative to photolithography. It can be shown, that sub-100-nm scale features can be fabricated throug ...

2005

Characterisation and applications of stencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Oscar Vazquez Mena, Nao Takano

Increased flexibility of patterning methods is important for the engineering of multimaterial and multifunctional nano/micro-electro-mechanical systems (NEMS/MEMS), such as polymer-based electronic and sensor devices, 3D microfluidic systems, and bio-analy ...

2005

Advancing towards well-controlled full-wafer nanostencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Nao Takano

The endeavour to develop nanodevices demands for patterning methods in the nanoscale. To bring nanodevices to the market, there is a need for fast, low-cost replication nanopatterning methods. In addition, an increased flexibility of the nanopatterning met ...

2005

Microscopic four-point probe (u4PP) based on SU-8 cantilevers

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz, Stephan Keller

Four-point probes (4PPs) are used for the resistivity measurement of thin metal or semiconductor films. There is an interest in miniaturization of 4PPs to obtain higher surface sensitivity, increased spatial resolution and less damage to the sample. Severa ...

2005

Nanostencil technique and its applications to Nanoelectronics

Jürgen Brugger, Oscar Vazquez Mena

The Nanostencil technique is an emerging nanopatterning method based on shadow mask evaporation. Micro and sub-micron apertures (down to 100-nm scale) are patterned in 100-500 nm thick low-stress silicon nitride membranes. The membrane is brought in close ...

2005

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