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Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, material ...
Micro-solid oxide fuel cell (mu SOFC) structures with annular Pt electrodes have been fabricated by means of silicon micromachining. The annular cathodes contained a defined triple phase boundary (TPB) length, which allowed the derivation of the ionic curr ...
2012
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Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
