Publications de Harry Heinzelmann

Integrated angular tracking and plasmonic membrane surfaces for a point of a care refractive index sensor

Hatice Altug, Harry Heinzelmann, Cenk Ibrahim Özdemir, Marie-Claude Bay

We present an optical system which integrates a plasmonic sensing surface and an angular tracking system to enable a compact refractive index measurement. A refractive index change at the surface of the sensing membrane causes a change in the angle at whic ...

Spie-Int Soc Optical Engineering2016

Parallel AFM imaging and force spectroscopy using two-dimensional probe arrays for applications in cell biology

Peter Vettiger, Harry Heinzelmann, Mélanie Favre, Martha Liley, André Meister

Atomic force microscopy (AFM) investigations of living cells provide new information in both biology and medicine. However, slow cell dynamics and the need for statistically significant sample sizes mean that data collection can be an extremely lengthy pro ...

Wiley-Blackwell2011

Hierarchical positioning of gold nanoparticles into periodic arrays using block copolymer nanoring templates

Patrik Willi Hoffmann, Harry Heinzelmann, Li Wang, Raphaël Pugin, Franck Montagne

We report a simple and versatile self-assembly method for controlling the placement of functional gold nanoparticles on silicon substrates using micellar templates. The hierarchical positioning of gold nanoparticles is achieved in one-step during the spont ...

2011

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Nicolas Blondiaux, Raphaël Pugin, Franck Montagne

In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...

2011

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

Jürgen Brugger, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin

Gold membranes with large arrays of sub-µm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was a ...

2011

Solid-state nanopore array membranes patterned by electron beam lithography, nanosphere lithography and aluminum anodization

Jürgen Brugger, Andreea Veronica Savu, Songmei Wu, Oscar Vazquez Mena, Harry Heinzelmann, Vaida Auzelyte, Mona Julia Katharina Klein, Nicolas Blondiaux, Raphaël Pugin, Franck Montagne

We present the fabrication of thin membranes with dense arrays of nanometer and submicrometer pore arrays by the integration of standard micromachining with three pore patterning techniques: electron beam lithography (EBL), nanosphere lithography (NSL) and ...

2011

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold ﬁlms for plasmonics

Jürgen Brugger, Harry Heinzelmann, Mona Julia Katharina Klein, Bernard Wenger, Raphaël Pugin

In this paper, a fast and inexpensive wafer-scale process for the fabrication of arrays of nanoscale holes in thin gold ﬁlms for plasmonics is shown. The process combines nanosphere lithography using spin-coated polystyrene beads with a sputter-etching pro ...

Institute of Physics2010

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

Nanoporous SiN membranes are interesting for a number of applications, e.g. stenciling, filtration, or tissue engineering [1-3]. The patterning of the pores requires a high resolution lithographic tool. Focused ion beam milling or e-beam lithography fulfil ...

2010

Dynamic Perspective on the Function of Thermoresponsive Nanopores from in Situ AFM and ATIZ-IR Investigations

Jeffrey Alan Hubbell, Harry Heinzelmann, Ana Maria Popa

This article describes the morphological and chemical characterization of stimuli-responsive functionalized silicon surfaces provided in parallel by atomic force spectroscopy (A FM) and Fourier transform infrared spectroscopy (FT-IR) enhanced by the single ...

2010

Fabrication of nanopore arrays and ultrathin silicon nitride membranes by block-copolymer-assisted lithography

Jeffrey Alan Hubbell, Harry Heinzelmann, Raphaël Pugin, Ana Maria Popa

Here we show a method for patterning a thin metal film using self-assembled block-copolymer micelles monolayers as a template. The obtained metallic mask is transferred by reactive ion etching in silicon oxide, silicon and silicon nitride substrates, thus ...

2009