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We report on the microfabrication and testing of a chip- scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity containing interdigitated Aluminum electrodes. When t ...
Hydraulic impedance is a critical parameter for the operation of electrospray emitters, and for preventing flooding when spraying from arrays of emitters. Controlling flow rate by tuning the flow impedance allows accessing different operating modes, such a ...
Nanoelectrosprays, well known for their use in sample injection for the mass spectrometry of large biomolecules, can also be used in other applications such as spacecraft propulsion. The thrust generated by a single electrospray emitter is well below 1 μN, ...
MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly in ...
We report on low-energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes. Implantation leads to the creation of nanometer-size clusters in the first 50 nm below the surfa ...
The miniaturization of dielectric elastomer actuators requires compliant electrodes that are clean, reliable, and that can be easily patterned on a mm or μm scale. Carbon-based electrodes, which are commonly used to make large-scale actuators, are not well ...
This paper presents the fabrication and operation of an integrated nano-electrospray thruster consisting of an array of microfabricated silicon capillary emitters and microfabricated silicon extractor electrodes. Based on previous work in which we showed o ...
In this work, we evaluate the exploration of the Solar system by ad-hoc wireless sensor networks (WSN), i.e. networks where all nodes (either moving or stationary) can both provide and relay data. The two aspects of self-organization and localization are t ...
An experimental study of the dc breakdown voltage for planar MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 micron is presented. Unlike most research on the breakdown in MEMS electrodes that was performed at atmospheric pressure, ...
We summarize recent results on micromachined dielectric elastomer actuators (DEA), or artificial muscles, whose compliant electrodes are made by low energy ion-implantation into an elastomer. Out-of-plane displacements in buckling mode of over 25% of the d ...