Publications de Ozge Zorlu | EPFL Graph Search

A second harmonic based resonance characterization method for MEMS electrostatic resonators

Ozge Zorlu, Mustafa Kangül, Furkan Gökçe, Eren Aydin

This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic co ...

ELSEVIER SCIENCE SA2018

Micro Fluxgate Sensor with Cascaded Planar Ring Cores

Pavel Kejik, Ozge Zorlu

In this paper, we present a new microfabricated fluxgate sensor structure having cascaded planar rings as the ferromagnetic core. A circular magnetic excitation is provided with a rod passing through the FeNi rings as a sewing thread. Planar coils placed u ...

2009

Orthogonal fluxgate magnetic field sensor

Pavel Kejik, Ozge Zorlu

Orthogonal fluxgate sensor for measuring an external magnetic field Hext, comprising a conductor for carrying an excitation current lexc, a ferromagnetic material adapted to saturate in the presence of a magnetic field generated by the excitation current, ...

2009

Orthogonal fluxgate type magnetic microsensors with wide linear operation range

Ozge Zorlu

This thesis presents a study on the development of microfabricated fluxgate type magnetic sensors operating within a wide linear operation range. Fluxgate type magnetic sensors are powerful devices due to their high sensitivity, low offset, and high temper ...

EPFL2008

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core

Radivoje Popovic, Pavel Kejik, Ozge Zorlu

In this paper, we present a new microfabricated orthogonal fluxgate sensor tructure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of ...

Elsevier2007

Fluxgate-type magnetic microsensors for wide linear measuring range

Radivoje Popovic, Pavel Kejik, Ozge Zorlu

In this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for si ...

2007

An Orthogonal Fluxgate-Type Magnetic Microsensor

Radivoje Popovic, Pavel Kejik, Franck Vincent, Ozge Zorlu

In this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated permalloy layer and has planar pick-up coils for signal detection. The use of ...

2006

A novel planar magnetic sensor based on orthogonal fluxgate principle

Radivoje Popovic, Pavel Kejik, Franck Vincent, Ozge Zorlu

In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core cov ...

2005