Paul Muralt, Ramin Matloub Aghdam, Vladimir Pashchenko, Sylvain Ballandras
A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire subst ...
Ieee2016