Publications de Marc Stranczl | EPFL Graph Search

High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology

Martinus Gijs, Christophe Yamahata, Marc Stranczl

Flexible bearings are advantageous for microelectromechanical systems as they enable precise, accurate, repeatable, and reliable motion without frictional contact. Based on the principle of a rotary folded-beam suspension, we have designed, fabricated, mod ...

Institute of Electrical and Electronics Engineers2012

Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems

Martinus Gijs, Christophe Yamahata, Marc Stranczl

A simple optical method is proposed for performing in-plane experimental modal analysis of micromachined structures with a conventional charge-coupled device (CCD) camera. The motion of a micromechanical device actuated by high frequency sinusoidal forces ...

Institute of Electrical and Electronics Engineers2012

Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Martinus Gijs, Christophe Yamahata, Marc Stranczl

We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural ...

IEEE2011

Subpixel translation of MEMS measured by discrete Fourier transform analysis of CCD images

Martinus Gijs, Christophe Yamahata, Marc Stranczl

We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with a subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device ( ...

2011