Suspended micro channel resonators (SMCs) consist of hollow resonant structures containing an embedded u-shaped micro fluidic channel. The confinement of the fluid inside the resonator allows real time detection of liquid compounds in air or in vacuum, whi ...

2016

Optical detector and amplifier for rf-detection

Luis Guillermo Villanueva Torrijo, Albert Schliesser

An optical detector for detecting radio frequency (RF) signals, the optical detector comprising a light source and a photodetector, and an electrical circuit comprising a position dependent capacitor and a bias voltage source adapted for providing a bias v ...

2016

Experiments on micro- and nano-mechanical systems (M/NEMS) have shown that their behavior under bending loads departs in many cases from the classical predictions using Euler-Bernoulli theory and Hooke's law. This anomalous response has usually been seen a ...

MDPI Ag2015

Resistless nanofabrication by stencil lithography: A review

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Oscar Vazquez Mena

We present a review on stencil lithography and focus on the particular interest and challenges when applying it to the scalable fabrication of nm-size devices. We first describe the basic technique with its main advantages and challenges. Then we review th ...

Elsevier2015

Fabrication of suspended hollow micro-resonators integrated with PZE electrodes

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

Fabrication of suspended hollow micro-resonators integrated with PZE electrodes ...

2015

NEMS Oscillators - Future Challenges and Workarounds

Luis Guillermo Villanueva Torrijo

NEMS Oscillators - Future Challenges and Workarounds ...

2015

Fabrication of suspended micro-resonator integrated with PZE electrodes

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

The objective of this project is the fabrication of hollow piezoelectric micro electric mechanical systems (PZE-MEMS) arrays with suspended micro-channels integrated with a microfluidic network. The ultimate goal is to demonstrate the feasibility of charac ...

2015

Nature Publishing Group2014

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