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We report on the susceptibility of structural MEMS materials to proton radiation damage. Radiation tests at spacerelevant doses were conducted on MEMS resonators. The two materials examined were single crystal silicon and SU-8, which are both in widespread ...
The susceptibility of single-crystal silicon and SU-8 resonators to proton-radiation induced degradation was investigated. Both materials are in widespread use for microsystems structures, thus the stability of the mechanical properties must be ensured ove ...
Institute of Electrical and Electronics Engineers2013
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Micro-solid oxide fuel cell (SOFC) systems are anticipated for powering small, portable electronic devices, such as laptop, personal digital assistant (PDA), medical and industrial accessories. It is predicted that micro-SOFC systems have a 2-4 higher ener ...
