Publications de Davide Balma | EPFL Graph Search

Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Paul Muralt, Ramin Matloub Aghdam, Robin Nigon, Silviu Cosmin Sandu, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...

Institute of Physics2015

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...

Institute of Electrical and Electronics Engineers2015

Process optimisation of a MEMS based PZT actuated microswitch

Davide Balma

In this work the fabrication of a piezoelectrically actuated microswitch for high current applications is proposed. The device was obtained by assembling two silicon substrates: one containing the signal lines and the other enclosing a silicon nitride (Si3 ...

Elsevier Science Bv2014

High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers

Paul Muralt, Andrea Mazzalai, Antonia Neels, Silviu Cosmin Sandu, Nachiappan Chidambaram, Alex Dommann, Davide Balma

A five-layer stack of lead zirconate titanate (PZT) thin films with Pt electrodes was fabricated for potential applications in nanoactuator systems. The 1 mu m thick PZT films were deposited by a sol-gel technique, the platinum electrodes by sputtering. Th ...

Wiley-Blackwell2014

Magnetoelastic Clock System for Nanomagnet Logic

Davide Balma, Mariagrazia Graziano

In recent years, magnetic-based technologies, like nanomagnet logic (NML), are gaining increasing interest as possible substitutes of CMOS transistors. The possibility to mix logic and memory in the same device, coupled with a potential low power consumpti ...

Ieee-Inst Electrical Electronics Engineers Inc2014

Comparison of Lead Zirconate Titanate Thin Films for Microelectromechanical Energy Harvester With Interdigitated and Parallel Plate Electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

Lead zirconate titanate (PZT) thin films on insulator-buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures because the former exploit the longitudinal pie ...

Ieee-Inst Electrical Electronics Engineers Inc2013

Resonant PZT MEMS Scanner for High-Resolution Displays

Paul Muralt, Davide Balma, Sven Holmström

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at ...

Institute of Electrical and Electronics Engineers2012