Publications de Damien Maillard

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

Luis Guillermo Villanueva Torrijo, Georg Fantner, Damien Maillard, Nahid Hosseini, Matthias Neuenschwander, Mustafa Kangül

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

2025

A 3D-Printed Functional Mems Accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-phot ...

IEEE2023

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Piezoelectric suspended microchannel resonators

Damien Maillard

The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level. The systems developed for these purposes consist of piezoelectrica ...

EPFL2022

Balancing of Coupled Piezoelectric NEMS Resonators

Luis Guillermo Villanueva Torrijo, Damien Maillard, Johannes Mathis Valentin Lemonde

Micro and Nano Electro Mechanical systems (M/NEMS) have a lot of potential to be used for sensing in different schemes and operation modes. We focus here on the use of coupled resonators for sensing and address the major limitation that these systems face, ...

FRONTIERS MEDIA SA2021

Thin Film Devices For 5G Communications

Luis Guillermo Villanueva Torrijo, Damien Maillard, Seniz Esra Küçük, Marco Liffredo, Soumya Yandrapalli, Muhammad Faizan

Piezoelectric-based resonators are some of the most used devices in the world. Invisible to most people, they constitute key elements for your mobile phone communications. With the advent of 50, the current technologies for piezoelectric resonators need to ...

IEEE2021

Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Amir Musa Abazari

Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typic ...

SPRINGERNATURE2021

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Philippe Renaud, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Stefano Silvio Giovanni Varricchio, Davide Scaiola, Carlo Ricciardi, Stefano Stassi

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Tom Larsen

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

2019

Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard

2018