Personne

Annalisa De Pastina

Publications associées (25)

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Suspended Microchannel Resonators (SMRs) enable real time analysis of fluidic samples with almost no degradation of the quality factor. - Energy dissipation is a non-monotonic function of the fluid viscosity. - Quality factor is highly dependent on the mic ...

2017

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The main objective of this work is to develop a reliable numerical model to describe dissipation in Suspended Microchannel Resonators, through determination of the Quality Factor, as a costless and quickly reproducible procedure to determine the effectiven ...

2017

Frequency stability of PZE actuated suspended micro-channel resonators

Annalisa De Pastina

We show the fabrication and characterization of a new generation of suspended microchannel resonators (SMRs) with integrated piezoelectric (PZE) actuation. We study resonance frequency, quality factor and frequency stability of singly-clamped hollow device ...

2017

Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators

Annalisa De Pastina, Damien Maillard

Existing solutions for suspended microchannel resonators packaging - Fluidic delivery (back-side) : PDMS or o-ring sealing - Vacuum encapsulation (front-side) : glass capping or o-ring sealing Our suspended microchannel resonators have inlets and outlets o ...

2017

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In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

2017

Nanoelectromechanical (NEMS) resonators have shown outstanding performance in mass sensing and heavy filtering applications due to their exceptional sensitivities and high quality factors. Examples of applications range from biomolecules/gas detection to e ...

2017

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

This project is focused on atomic layer deposition of aluminium oxide to fabricate suspended microchannel resonators. Few examples of the applications of such devices are blood analysis to detect cancerous cells or device cooling directly on the chip. The ...

2016

50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators

Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Ramin Matloub Aghdam, Kaitlin Marie Howell, Waqas Bashir

We report on the optimization of a multilayer platinum/aluminum nitride (AlN) stack with an AlN active layer thickness of 50 nm for piezoelectric actuation in nanoelectromechanical systems (NEMS). Experiments in reactive sputtering of AlN were used to find ...

2016

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Antoine Nicolas Désiré Aupée

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in m ...

2016