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Andrea Lozzi

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In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020

Longitudinal neural and vascular structural dynamics produced by chronic microelectrode implantation

Andrea Lozzi

Implanted microelectrode arrays sense local neuronal activity, signals which are used as control commands for brain computer interface (BCI) technology. Patients with tetraplegia have used BCI technology to achieve an extraordinary degree of interaction wi ...

ELSEVIER SCI LTD2020

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019

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This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

IEEE2019

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In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

2019

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

2019

Characterization of Contour Mode Resonators

Andrea Lozzi

In this report, the in uence of several geometric parameters on the performance of aluminum nitride (AlN) contour mode resonators (CMR) is investigated at dierent frequencies (182 MHz, 460 MHz and 570 MHz). Main in uence is the anchor width (Wa) and the an ...

2017

Piezoelectric Nanoelectromechanical Systems

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Andrea Lozzi, Kaitlin Marie Howell, Muhammad Faizan

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

2017

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

Finite Element Modeling of Acoustic Shielding via Phononic Crystal structures

Clémentine Sophie Sarah Lipp, Andrea Lozzi

Quality factor of Contour Mode Resonators (CMR) are mainly affected by energy losses due to acoustic waves leaving the resonator through the anchors. An engineering of the anchors in order to create a periodic variation in the acoustic impedance of the mat ...

2016