Publications de Teodoro Graziosi

Method for flattening substrates or layers using 3d printing and etching

Niels Quack, Teodoro Graziosi, Marcell Kristof Kiss, Nathanaël Restori

The present invention concerns a layer or substrate flattening method comprising the steps of: - providing a layer or substrate (1) to be flattened; - measuring a topography or surface profile of at least one area (3) of the layer or substrate to be flatte ...

2021

Integrated photonic devices in single crystal diamond

Niels Quack, Teodoro Graziosi, Sichen Mi, Marcell Kristof Kiss

The field of diamond photonics is reviewed, with a focus on recent experimental demonstrations of photonic integrated devices in a single crystal diamond. This field leverages the outstanding material properties of diamond with the aim to establish large-s ...

2020

Non-contact polishing of a crystalline layer or substrate by ion beam etching

Niels Quack, Teodoro Graziosi, Sichen Mi

Polishing method comprising the steps of: - providing at least one crystalline layer or substrate, the at least one crystalline layer or substrate extending in at least one plane, and including at least one outer surface and at least one depression extendi ...

2020

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Niels Quack, Pascal Gallo, Teodoro Graziosi, Sichen Mi, Marcell Kristof Kiss, Mehdi Naamoun

2020

Non-contact polishing of single crystal diamond by ion beam etching

Niels Quack, Teodoro Graziosi, Sichen Mi

We propose a non-contact surface finishing method for brittle substrates by ion beam etching and we experimentally demonstrate polishing of (100) single crystal diamond surface. We model and simulate the polishing process, and verify the results experiment ...

2019

Single crystalline diamond diffractive optical elements and method of fabricating the same

Niels Quack, Teodoro Graziosi, Marcell Kristof Kiss

The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrat ...

2019

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Teodoro Graziosi

Microresonators are fundamental building blocks of any photonic integrated circuit, as they can be used as filters, modulators, sensors, and to enhance light emission. If these resonators are suspended and are free to oscillate, we can exploit the interact ...

EPFL2019

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Niels Quack, Pascal Gallo, Teodoro Graziosi, Marcell Kristof Kiss

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adh ...

2019

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Olivier Martin, Niels Quack, Christian Santschi, Toralf Scharf, Teodoro Graziosi, Marcell Kristof Kiss

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available diamond plates. Both V-groove and rectangular gratin ...

2019

Silicon Photonic MEMS Phase-Shifter

Niels Quack, Hamed Sattari, Teodoro Graziosi, Marcell Kristof Kiss

We present a design for an analog phase shifter based on Silicon Photonic MEMS technology. The operation principle is based on a two-step parallel plate electrostatic actuation mechanism to bring a vertically movable suspended tapered waveguide in a first ...

2019