Enrico Casamenti

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Glass-in-glass infiltration for 3D micro-optical composite components

Yves Bellouard, Mathieu Bertrand, Luciano Borasi, Enrico Casamenti, Jérôme Faist, Andreas Mortensen, Gözden Torun

Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and environmental stability, producing three-dimensional microstructures of chalcogenide glass remains a challenge. Here, we combine the fabrication of arbitrarily shaped three-dimensional cavities within fused silica molds by means of femtosecond laser-assisted chemical etching with the pressure-assisted infiltration of a chalcogenide glass into the resulting carved silica mold structures. This process enables the fabrication of 3D, geometrically complex, chalcogenide-silica micro-glass composites. The resulting products feature a high refractive index contrast that enables total-internal-reflection guiding and an optical quality roughness level suited for applications in the infrared.

2022

Chargement

In the last decades, the femtosecond laser micromachining of glass has attracted a lot of attention due to its three-dimensional manufacturing ability and flexibility both in terms of compatible substrates and modification types. Yet, to fully unravel its potential for the production of multi-functional micro-devices, new techniques able to integrate multiple materials in the same glass substrate have to be conceived.In this thesis work, we present a few techniques based on micro-infiltration to integrate both noble metals and glass architectures in a single glass substrate. Specifically, we select femtosecond laser-assisted chemical etching as a means to realize the glass molds and we design a vacuum pressure-assisted micro-infiltration process to cast different materials in fused silica.The first part of the study focuses on femtosecond laser-assisted chemical etching as a manufacturing process. From a technological perspective, (i) we demonstrate the presence of a low laser fluence regime that enables an order of magnitude increase in laser writing speed while maintaining or surpassing selectivity and etching rate obtained for commonly used laser parameters, and (ii) we introduce sodium hydroxide as a novel and more environmentally friendly etching solution and show its superior performance compared to potassium hydroxide and hydrofluoric acid solutions. From the fundamental point of view, we prove that the low laser fluence etching regime is mainly governed by the presence of laser-induced molecular defects, and not by the presence of 'nanogratings', which were usually accounted for the origin of laser-assisted etching selectivity. Further, the observation of an anisotropy in the etching rate for different laser polarization states even with such a low laser fluence suggests that self-organization phenomena are initiated after far fewer pulses than the amount needed for the formation of nanogratings.The second part of the study introduces a pressure-assisted micro-infiltration process and explains the challenges in translating casting to the micron-scale. In particular, we demonstrate the ability of such a process to produce micron-scale architectures of arbitrary geometrical complexity in 3D out of noble metals (silver, gold, copper, and their alloys) and an infrared glass from the chalcogenide family. Additionally, we study its potential for large-scale production compared to existing technologies and explore techniques to produce self-standing glass-metal composites and to perform multiple infiltrations of different materials on the same substrate.This thesis is a step forward in the direction of manufacturing multi-materials monolithic multi-functional glass devices. This combination of materials with completely different properties allows almost unlimited possibilities in terms of designing novel architectures for applications in microtechnologies.

EPFL2022

Chargement

3D metal freeform micromanufacturing

Yves Bellouard, Luciano Borasi, Enrico Casamenti, Raphaël Charvet, Léa Deillon, Cyril Dénéréaz, Fatmah Ebrahim, Andreas Mortensen, Sacha Jérémy Florentin Pollonghini, Tao Yang

Despite remarkable progress made in recent years, producing freeform three-dimensional micro-components out of copper, silver or gold and their alloys remains an engineering challenge: current processes are either too slow to be economically viable, or produce porous or otherwise imperfect metal microstructures. Here we introduce an alternative, faster approach for the freeform fabrication of metal micro-components amenable to the processing of noble metals. The process begins with the 3D, micron-resolution, carving of arbitrarily shaped interconnected molds into amorphous silica using femtosecond laser micromachining and selective etching. This is followed by pressure infiltration of the mold with the molten metal, which is subsequently solidified. Metal architectures produced by this process have micron-scale resolution, are fully freeform and multiscale in geometry, and are made of dense metal, while the process speed largely exceeds what is achieved in current alternative metal microfabrication approaches. The resulting glass/metal combinations enable new micro-device architectures. Alternatively, by mold dissolution, self-standing micron-scale 3D metal parts are produced, of high metallurgical quality and with features sizes down to ~2 μm.

2021

Chargement