Edouard Franck Vincent Gustave Leroy

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Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Vesna Bacheva, Aiste Balciunaite, Amir Firouzeh, Edouard Franck Vincent Gustave Leroy, Herbert Shea

The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoconductive switches together with a light projection system to individually address highvoltage actuators. Each actuator is connected to one or more switches that are nominally OFF unless turned ON using direct light illumination. We selected hydrogenated amorphous silicon (a-Si:H) as our photoconductive material, and we provide a complete characterization of its light to dark conductance, breakdown field, and spectral response. The resulting switches are very robust, and we provide full details of their fabrication processes. We demonstrate that the switches can be integrated into different architectures to support both AC and DC-driven actuators and provide engineering guidelines for their functional design. To demonstrate the versatility of our approach, we demonstrate the use of the photoconductive switches in two distinctly different applications-control of mu m-sized gate electrodes for patterning flow fields in a microfluidic chamber and control of cm-sized electrostatic actuators for creating mechanical deformations for haptic displays.

SPRINGERNATURE2023

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Hydraulically Amplified Electrostatic Taxels (HAXELs) for Full Body Haptics

Edouard Franck Vincent Gustave Leroy, Herbert Shea

The ability to mechanically stimulate touch receptors over the entire body is a key feature for fully immersive and highly realistic virtual reality experience. Haptic stickers, flexible arrays of HAXELs (hydraulically amplified TAXels), that enable cutaneous haptics over nearly all parts of the body, are reported. HAXELs are zipping electrostatic actuators that combine stretchable elastomers and high permittivity flexible films to generate both high strains and high forces, from DC to 200 Hz. A fabrication process that enables scaling HAXELs from 2 to 15 mm in diameter is presented, allowing to tailor the actuators to different body parts and to wearables such as wrist-watches. The different sizes of HAXELs generate blocked forces from 100 to 800 mN, with DC displacements from 100 to 850 mu m, well above sensation thresholds. Haptics tests of Haptic Stickers, 5 x 5 arrays of 10 mm diameter devices, on palms, back of the hand, neck, arm, and back of a dozen volunteers, are done with users reporting high pattern recognition success on many body locations. The Haptic Stickers uniquely offer a thin and lightweight form-factor, which does not limit the freedom of motion of the user, compatible with untethered scenarios.

WILEY2023

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A dielectric actuator including an enclosure forming a cavity having a dielectric fluid therein, the enclosure having a base, a flexible membrane and a reversibly-stretchable membrane, and a pair of electrodes, one electrode of the pair of electrodes arranged at the flexible membrane, the other electrode arranged at the base, the pair of electrodes arranged to generate an electric field to an area of the cavity that is filled with the dielectric fluid, wherein when the electric field is generated between the pair of electrodes, an electrostatic pressure in the dielectric fluid causes the flexible membrane to move towards the base, reducing an initial volume of the area of the cavity, increases a pressure of the dielectric fluid inside the cavity, and causes the reversibly-stretchable membrane to bump out to an expanded state.

2021

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