Publications de Caroline Hain | EPFL Graph Search

Nanostructure and Optical Property Tailoring of Zinc Tin Nitride Thin Films through Phenomenological Decoupling: A Pathway to Enhanced Control

Aïcha Hessler-Wyser, Johann Michler, Amit Sharma, Caroline Hain, Daniele Casari, Thomas Nelis

This work addresses the need for precise control of thin film sputtering processes to enable thin film material tailoring on the example of zinc tin nitride (ZTN) thin films deposited via microwave plasma-assisted high power reactive magnetron sputtering ( ...

Amer Chemical Soc2024

Liquid metal infiltration of silicon based alloys into porous carbonaceous materials Part-III: Experimental verification of conversion products and infiltration depth by infiltration of Si-Zr alloy into mixed SiC/ graphite preforms

Ludger Weber, Annapaola Parrilli, Caroline Hain, Alberto Ortona, Manoj Kondibhau Naikade

Porous carbonaceous preforms, made from graphite and silicon carbide (SiC) powders, with varying graphite powder mass fractions and particle sizes, were infiltrated at 1500 degrees C and 1700 degrees C by Si-8 at. pct Zr alloy to produce dense Si-Zr-SiC co ...

ELSEVIER SCI LTD2023

Resist-Free E-beam Lithography for Patterning Nanoscale Thick Films on Flexible Substrates

Caroline Hain

Resist-based lithographic tools, such as electron beam (e beam) and photolithography, drive today's state-of-the-art nanoscale fabrication. However, the multistep nature of these processes, expensive resists, and multiple other consumables limit their pote ...

2023

Crystalline or amorphous? A critical evaluation of phenomenological phase selection rules

Johann Michler, Caroline Hain, Ashish Sharma

In this work, we reviewed the available phase selection rules comprising atomic size and topological aspects, entropies, enthalpies, melting points, valence and itinerant electron concentrations, as well as electronegativity, and validated them using a car ...

ELSEVIER SCI LTD2023

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Caroline Hain

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation

Aïcha Hessler-Wyser, Johann Michler, Jonathan Emanuel Thomet, Caroline Hain, Thomas Nelis

This work focuses on the low temperature fabrication process of InN thin films via microwave plasma-assisted reactive high power impulse magnetron sputtering (MAR-HiPIMS). The influence of microwave plasma on the HiPIMS discharge process at various nitroge ...

ELSEVIER SCIENCE SA2022

Liquid metal infiltration of silicon based alloys into porous carbonaceous materials. Part II: Experimental verification of modelling approaches by infiltration of Si-Zr alloy into idealized microchannels

Ludger Weber, Caroline Hain, Giovanni Bianchi, Alberto Ortona, Manoj Kondibhau Naikade

In this work, the mechanisms leading to the pore closure in reactive melt infiltration (RMI) of carbon by pure silicon and a near eutectic Si-8 at-pct Zr alloy at 1500 and 1700 degrees C under vacuum were studied. Various geometrical configurations of micr ...

ELSEVIER SCI LTD2022

From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films

Aïcha Hessler-Wyser, Johann Michler, Caroline Hain, David Brown, Thomas Nelis

The fabrication of high-hardness non-hydrogenated diamond-like carbon (DLC) via standard magnetron sputtering (MS) is often hindered by the low sputtering yields and ionisation rates of carbon, therefore investigations into pulsed alternatives of MS, else ...

ELSEVIER SCIENCE SA2022