Publications de Zheru Qiu | EPFL Graph Search

Ultrafast Tunable Photonic Integrated Extended-DBR Pockels Laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin

Hybrid photonic integrated lasers have revolutionized laser technology by combining the scalable manufacturing of simple laser diodes with high-performance features such as frequency stability, opticallinewidth, and tuning linearity [1], traditionally only ...

IEEE2025

Ultrafast tunable photonic-integrated extended-DBR Pockels laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrey Voloshin

Frequency-agile lasers that can simultaneously feature low noise characteristics and fast mode-hop-free frequency tuning are keystone components for applications ranging from LiDAR and distributed sensing to communication and quantum information processing ...

Nature Publishing Group2025

C- and L-band tunable integrated Erbium lasers via scalable manufacturing

Tobias Kippenberg, Xinru Ji, Zheru Qiu, Grigorii Likhachev, Andrey Voloshin

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits. We achieve single-frequency lasing tunable from 1530 nm to 1621 nm covering nearly the entire optica ...

Optica Publishing Group2025

High-Energy Mode-Locked Pulses from a Photonic Integrated Mamyshev Oscillator

Tobias Kippenberg, Jianqi Hu, Xinru Ji, Zheru Qiu, Grigorii Likhachev, Zihan Li

Mode-locked lasers (MLLs), capable of generating ultrashort coherent pulses, have been instrumental for numerous applications, including optical frequency metrology, eye surgery, machining, additive manufacturing, imaging and spectroscopy. However, commerc ...

IEEE2025

Octave-Spanning Kerr Frequency Comb in a Si3N4 Microresonator at Electronically Detectable Repetition Rate

Tobias Kippenberg, Zheru Qiu, Alisa Davydova, Miles Henry Anderson

A key challenge in microresonator-based frequency combs has been achieving f-2f self-referencing, which requires a powerful, octave-spanning microcomb. Stable self-referenced combs have numerous applications including ultra-low-noise microwave generation a ...

IEEE2025

Photonic substrate preparation method and photonic waveguide preparation or fabrication method

Tobias Kippenberg, Xinru Ji, Zheru Qiu

Photonic integrated circuit optical waveguide device preparation or fabrication method comprising providing a silicon substrate, depositing at least one copper gettering silicon nitride layer or material, depositing at least one optical waveguide cladding ...

2024

A fully hybrid integrated erbium-based laser

Tobias Kippenberg, Rui Ning Wang, Xinru Ji, Zheru Qiu, Andrea Bancora, Andrey Voloshin

Erbium-doped fibre lasers exhibit high coherence and low noise as required for fibre-optic sensing, gyroscopes, LiDAR and optical frequency metrology. Endowing erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-nois ...

Nature Publishing Group2024

Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Xinru Ji, Zheru Qiu

We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si3N4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm ...

Optical Society of America2024

Piezoelectrically tunable, narrow linewidth photonic integrated extended-DBR lasers

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Andrea Bancora, Junyin Zhang, Andrey Voloshin

Recent advancements in ultra-low-loss silicon nitride (Si3N4)-based photonic integrated circuits have surpassed fiber lasers in coherence and frequency agility. However, high manufacturing costs of DFB and precise control requirements, as required for self ...

Optica Publishing Group2024

Photonic-electronic integrated circuit-based coherent LiDAR engine

Edoardo Charbon, Tobias Kippenberg, Xinru Ji, Zheru Qiu, Grigorii Likhachev, Halil Kerim Yildirim, Andrea Bancora, Anton Lukashchuk, Andrey Voloshin

Chip-scale integration is a key enabler for the deployment of photonic technologies. Coherent laser ranging or FMCW LiDAR, a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range, and immunit ...

Nature Portfolio2024