Caractérisation de décharges à barrières diélectriques atmosphériques et sub-atmosphériques et application à la déposition de couches d'oxyde de silicium
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An electrostatic charge can be left on an insulating substrate after RF plasma processing, even though the plasma and surfaces are globally neutral. High voltages and breakdown can then occur when the substrate is manipulated. If the substrate is not a per ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
Good understanding of the different phases of involved plasma-chemistry is essential for the development of non thermal plasma technologies for pollution control. These techniques are often based on the production of radicals from dissociation parent gases ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
Summary form only given. We have developed a diagnostic of absolute concentration measurement based on a time resolved resonant absorption spectroscopy. The probe signal *OH(A2Σ+ -X2Π, λ≈308 nm) is generated in a high pulse voltage triggered DBD probe. ...
In situ Fourier transform infrared (FTIR) absorption spectroscopy has been used to determine the fractional depletion of silane in a radio-frequency (ri) glow discharge. The technique used a simple single-pass arrangement and was implemented in a large-are ...
We studied a new approach to cell ashing based on illuminating the specimens with a low-pressure mercury discharge lamp. We analyzed with synchrotron spectromicroscopy its effects on different physiological elements in neurobiological specimens. Our result ...
The measurements obtained were used to investigates the methanol synthesis reaction from pure carbon dioxide and hydrogen over binary (CuO/ZrO2) and ternary supported catalysts (CuO/ZnO/Al2O3). A comparison of different catalysts is presented. The influenc ...
