Christian Depeursinge, Florian Lang, Daniel Boss, Yves Delacrétaz
In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the i ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010