Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
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We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
We report on the first ion-implanted dielectric electroactive polymer actuator that was successfully microfabricated and tested. Ion implantation is used to make the surface of the polymer locally conducting. Implanting the compliant electrodes solves the ...
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We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
