Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas
Publications associées (32)
Graph Chatbot
Chattez avec Graph Search
Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.
AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.
Polycrystalline zinc oxide (ZnO) films, prepared by low-pressure chemical vapor deposition are investigated in this thesis. ZnO belongs to the class of transparent conductive oxide materials, as it is transparent to light from the visible to the near-infra ...
Nowadays thin films play an important role in everyday life and in industries. Thin film technology has been developed primarily for the growing demand for development of smaller and smaller devices that require advanced materials and new processing techni ...
Qualitative and quantitative analyte analysis is omnipresent: from quality control in food, pharmaceutical, biotechnology industries, to new molecular syntheses, detection of explosives and drugs, as well as natural compound mixture analysis, such as crude ...
Silane and hydrogen discharges are widely used for the deposition of silicon thin film solar cells in large area plasmaenhanced chemical vapor deposition reactors. In the case of microcrystalline silicon thin film solar cells, it is of crucial importance t ...
The vacuum deposition of complex functional molecules and nanoparticles by thermal sublimation is often hindered due to their extremely low vapor pressure. This especially impedes the application of ultrahigh vacuum (UHV) based analytical and surface modif ...
MS (mass spectrometry) has been developed as an important analytical tool to study large molecules including polymer macromolecules and proteins. Its instrumentation technique including ionization methods, mass analyzer and detector systems has been greatl ...
In the frame of this thesis, two similar high current DC arc (HCDCA) plasma sources were investigated in a low gas pressure regime (10-3-10-2 mbar). One of them was initially designed for the epitaxial growth of silicon and silicon germanium (LEP), the oth ...
We study the high-rate deposition of microcrystalline silicon in a large-area plasma-enhanced chemical-vapor-deposition (PECVD) reactor operated at 40.68 MHz, in the little-explored process conditions of high-pressure and high-silane concentration and depl ...
Results of the mechanistic studies of free-electron based fragmentation methods addressing peptide and protein structure analysis with mass spectrometry (MS), electron capture dissociation (ECD) and electron ionization dissociation (EID), are presented. Se ...
Single-use aluminum foil-based laser desorption/ionization (LDI) target plates have been developed for mass spectrometry (MS) analysis and provide detection results comparable to those of commercial stainless steel plates while offering a convenient way to ...