Metal ion implanted electrodes for dielectric elastomer actuators
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The miniaturization of dielectric elastomer actuators requires compliant electrodes that are clean, reliable, and that can be easily patterned on a mm or μm scale. Carbon-based electrodes, which are commonly used to make large-scale actuators, are not well ...
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We report on low-energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes. Implantation leads to the creation of nanometer-size clusters in the first 50 nm below the surfa ...
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This article presents metal ion implantation as an alternative technique to fabricate compliant electrodes for small-size dielectric elastomer actuators. When reducing the size of these actuators to below 1 cm, the ability to pattern the electrodes is adde ...
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