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We have performed thermal measurements and electrothermal simulations (finite element modelling) with the aim of optimizing the power consumption and the temperature distribution of micro-hotplates for gas-sensing applications. A silicon island was added u ...
This paper presents recent work on complete thick-film systems, including dielectrics, conductors and resistors, with a lowered firing temperature range of 450...750°C. These materials allow the extension of proven, reliable and inexpensive thick-film tech ...
Abstract—A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable s ...
Strontium Bismuth Titanate is a very promising material for high temperature piezoelectric applications, its elevated ferroelectric phase transition (530°C), linear piezoelectric properties under low field and relatively low room temperature conductivity ( ...
Inductive proximity sensors are widely used for the contactless measurement of object or target displacement and position in numerous technical products and systems. They are found in various application domains such as transportation, robots, assembly lin ...
This work reports on thermally isolated electronic components for gas sensing applications. The device is composed of an array of 4 MOSFET, a diode and a semiconductor resistor integrated on a micro-hotplate, which is fabricated using bulk micromachining o ...
