Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor
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Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer products by replacing bulky devices by miniaturized versions that are suitable for portable applications as for instance in mobile phones. Besides small size, the ...
The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...
The recent progress in synthesis and integration of highly piezoelectric lead-zirconate-titanate (PZT) thin films onto silicon substrates are paving the way for new, more efficient and faster devices in micro electro-mechanical systems (MEMS). In compariso ...
Lead zirconate titanate (PZT) thin films on insulator-buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures because the former exploit the longitudinal pie ...
Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...
This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...
The use of acoustic resonators for sensors application has opened a new branch in research and applications of piezoelectric materials and devices. The first generation of such sensors is constituted by the quartz crystal microbalance (QCM) based on AT-cut ...
Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
Ferroelectric ceramic – polymer composites have a unique mix of electrical and mechanical properties. Piezoelectric and pyroelectric activity, a wide range of dielectric constants and high breakdown strength are combined with mechanical flexibility, formab ...
This work was originally motivated by the search for high-temperature piezoceramic materials with low acoustic impedance and high electromechanical coupling. The temperature and pressure behavior of two PZT-based materials with engineered porosity, Pz31 & ...
