Design, Simulation, Fabrication, and Characterization of a Digital Variable Optical Attenuator
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A new surface micromachining method based on porous silicon formation followed by electropolishing is presented in this paper. It generates in a single electrochemical etch step a plate of porous silicon, releases it from the substrate without using a sacr ...
After microelectromechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology o ...
A monolithic silicon integrated optical micro-scanner is presented. The device consists of a mirror located an the tip of a thermal bimorph actuator beam. The fabrication process is very simple and compatible with IC fabrication techniques. The device is e ...
A monolithic silicon integrated optical micro-scanner is presented. The device consists of a mirror located on the tip of a thermal bimorph actuator beam. The fabrication process is very simple and compatible with IC fabrication techniques. The device is e ...