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Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films

Publications associées (33)

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Piezoelectric suspended microchannel resonators

Damien Maillard

The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level.The systems developed for these purposes consist of piezoelectrical ...

EPFL2022

Intrinsic switching in Si-doped HfO2: A study of Curie-Weiss law and its implications for negative capacitance field-effect transistor

Mihai Adrian Ionescu, Igor Stolichnov, Ali Saeidi, Teodor Rosca, Sadegh Kamaei Bahmaei, Eamon Patrick O'Connor, Matteo Cavalieri, Carlotta Gastaldi

HfO2-based ferroelectrics are considered a promising class of materials for logic and memory applications due to their CMOS compatibility and ferroelectric figures of merit. A steep-slope field-effect-transistor (FET) switch is a device for logic applicati ...

AMER INST PHYSICS2021

Actuation of piezoelectric structures with ferroelectric thin films having multiple elements

Paul Muralt

A method for driving piezoelectric elements of a micro-system. The piezoelectric elements comprising a ferroelectric thin film, and being configured to be part of any one or a combination of items of a list comprising: a cantilever, a bridge, a diaphragm, ...

2020

Multimode microwave circuit optomechanics as a platform to study coupled quantum harmonic oscillators

Nathan Rafaël Bernier

Harmonic oscillators might be one of the most fundamental entities described by physics. Yet they stay relevant in recent research. The topological properties associated with exceptional points that can occur when two modes interact have generated much int ...

EPFL2019

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used ...

IEEE2018

3D printed microwave cavity for atomic clock applications: proof of concept

Anja Skrivervik, Emile Jacques de Rijk

The authors present the realisation and characterisation of an additively manufactured (AM) microwave resonator cavity for double-resonance (DR) vapour-cell atomic clocks. The design of the compact microwave cavity is based on the loop-gap resonator approa ...

2018

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We report on the design and characterization of single-chip electron spin resonance (ESR) detectors operating at 50 GHz, 92 GHz, and 146 GHz. The core of the single-chip ESR detectors is an integrated LC-oscillator, formed by a single turn aluminum planar ...

Academic Press Inc Elsevier Science2017

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scan ...

Optical Soc Amer2017

We have successfully demonstrated the fabrication of self-actuating multilayer NEMS resonators including cantilevers and double clamped beams. Resonant sensors are widely used as precision mass sensors for the detection and quantification of small concentr ...

2016

This document gives an approximate calculation of the frequency bandwidth of the MilliNewton – and serves as a starting point for calculations on other cantilever-type sensors. The mechanical resonance frequencies of MilliNewton are high, due to the very s ...

EPFL2014