Sensorless position detection of a linear actuator using the resonance frequency
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Institute of Electrical and Electronics Engineers2008
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NOVELTY - The microscope (11) has a set of four actuators (14, 16, 18, 20) i.e. piezoelectric actuators, and a strain gauge coupled to two opposed actuators (14, 18), arranged in opposed push or push-pull configuration to measure the differential motion of ...
