Precise control of multilayered structures of Nb–O–N thin films by the use of reactive gas pulsing process in DC magnetron sputtering
Publications associées (102)
Graph Chatbot
Chattez avec Graph Search
Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.
AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.
Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...
Self-supporting thin films containing nanopores are very promising materials for use for multiple applications, especially in nanofiltration. Here, we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an a ...
Atomic layer deposition (ALD) is one of the premier methods to synthesize ultra-thin materials on complex surfaces. The technique allows for precise control of the thickness down to single atomic layers, while at the same time providing uniform coverage ev ...
The aim of this project is to deposit a thin film of aluminum nitride (AlN) or aluminum scandium nitride (AlScN) on a quartz substrate showing good piezoelectric properties for use in tuning fork oscillators. Quartz oscillators are commonly used in various ...
Coating nano particles and other substrates for efficiency enhancement, protection and obtaining new atomic structures is a widespread research topic in catalysis and material synthesis. Thus far, different approaches of coating, ranging from simplest to s ...
The goal of this project was to study if the fabrication of glass suspended microchannel resonators was possible. Through trial and error, the process parameters were determined, starting from the ideal dose in the dry etching process. The ideal size was d ...
Ecosystem productivity is strongly modulated by the atmospheric deposition of inorganic reactive nitrogen (the sum of ammonium and nitrate). The individual contributions of ammonium and nitrate vary considerably over space and time, giving rise to complex ...
Hafnium Carbide (HfC) is a refractory ceramic known for its exceptional properties, making it suitable for a wide range of applications. This project investigates the potential utilization of HfC in Micro or Nano Electromechanical Systems (MEMS/NEMS) and e ...
Thin film coatings are ubiquitous in modern daily lives, from the semi-conductor industry to aesthetic applications, and rely on the modification of a given material to enhance its surface properties.
At CERN (European Organization for Nuclear Research), t ...
First of a kind SOLPS-ITER simulations on tokamak a configuration variable (TCV) that include nitrogen have been performed to model recent nitrogen seeded detachment experiments. Based on spectroscopic measurements, a nitrogen recycling coefficient R-p(N) ...