Research and developments in thin film silicon photovoltaics
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Production volume of PV modules increases at > 35% per year, but one is yet far from making a global impact on energy supply. One of the obstacles is given by the present high production costs of PV modules. A possibility to reduce costs are thin-film PV m ...
Plasma enhanced chemical vapour deposition (PECVD) of thin films such as amorphous silicon has widespread applications especially in the field of photovoltaic solar cells and thin-film transistors for flat screen production. Industrial applications require ...
During the last two decades, the Institute of Microtechnology (IMT) has contributed in two important fields to future thin-film silicon solar cell processing and design: (1) In 1987, IMT introduced the so-called "very high frequency glow discharge (VHF-GD) ...
In this work, a new type of short water vapor treatment of the interface between the p- and i-layer is presented. This novel treatment is performed under vacuum below 1 mbar for 5 min and considerably reduces the i-layer boron contamination in amorphous si ...
In microcrystalline hydrogenated silicon (μc-Si:H), the drift mobility dependencies of holes on electric field and temperature have been measured by using a method of equilibrium charge extraction by linearly increasing voltage. At room temperature the est ...
We have demonstrated an original approach for fabricating microcavities in GaN grown on Si. Holes are etched in the Si substrate and highly reflective dielectric mirrors are deposited on both front and back sides. The cavity has been optically characterize ...
A novel mechanical structure design with reduced deflection offset is reported. This design offers a batch processing solution to a well-known problem in the fabrication of very thin crystalline silicon structures, that is initial bending due to anchoring ...
A novel mechanical structure design with reduced deflection offset is reported. This design offers a batch processing solution to a well-known problem in the fabrication of very thin crystalline silicon structures, that is initial bending due to anchoring ...
Zinc oxide (ZnO) is a material that belongs to the family of Transparent Conductives Oxides (TCO). Its non-toxicity and the abundant availability in the Earth's crust of its components make it an ideal candidate as electrical transparent contact for thin-f ...
The case for thin-film silicon as one of the main future options for cost-effective photovoltaic solar cells is outlined. The limitations of present amorphous silicon (a-Si:H) solar cells are briefly mentioned. Hydrogenated microcrystalline silicon (μc-Si: ...