3D Structuration Techniques of LTCC for Microsystems Applications
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We introduce powder blasting using a pressurised nozzle and a metallic mask as a new promising technology for microsystem fabrication. We study basic parameters of this powder blasting erosion process as well as mask-geometry effects on the erosion rate. W ...
We present a new approach for contactless conductivity detection for microchip-based capillary electrophoresis (CE). The detector integrates easily with well-known microfabrication techniques for glass-based microfluidic devices. Platinum electrodes are st ...
A set of new technologies to fabricate microchannels using photosensitive polymer materials is presented. They are based on the use of polymers, hereafter called photopolymers, that are cured with UV light under a mask exposure. The basic material is ail e ...
This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same su ...
We developed high-density microfluidic chips that contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using l ...
A new, versatile architecture is presented for microfluidic devices made entirely from glass, for use with reagents which would prove highly corrosive for silicon. Chips consist of three layers of glass wafers bonded together by fusion bonding. On the insi ...
This article presents the first example of a microfluidic chip for heterogeneous bioassays using a locally immobilized biospecitic layer and operated electrokinetically. The reaction chamber has picoliter dimensions and is integrated into a network of micr ...
This paper describes the design, fabrication and experimental results of a new, low cost, high-performance silicon micropump developed for a disposable drug delivery system. The pump chip demonstrates linear and accurate (+/-5%) pumping characteristics for ...
On-chip cell handling and analysis is given more and more interest, as new cytometry devices can be realised or efficiently combined and integrated. The developed sensor presents several improvements compared to other integrated flow cytometers. It is aime ...
