Publication
A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.
Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen
Tobias Kippenberg, Guanhao Huang, Alberto Beccari, Nils Johan Engelsen
Edoardo Charbon, Pasquale Scarlino, Fabrizio Minganti, Simone Frasca, Marco Scigliuzzo, Vincent Jean Yves Jouanny, Fabian Oppliger, Roberto Musio