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It is in the context of miniaturization that arises the microfluidics concept. It is not uncommon in chemical, biological or medical analysis laboratories to manipulate or to mix fluids while measuring the results with filters, spectrometers or all other e ...
EPFL2014
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Wafer bonding using parylene-C to Si, SiO2 and SiN surfaces has recently been shown to enable high pressure-resistant microfluidic devices with metallization and CMOS-integration capability. Here, we report characterization of intermediate parylene-C bondi ...
2012
The development of microfluidics has led to significant improvements in many areas of in vitro diagnostics. This thesis proposes the use of microfluidic device technology in the field of anatomic pathology, leading to faster and more accurate tissue-based ...
A large number of lab-on-a-chip applications use fluorescence for quantifying biological entities. In such applications, incorporation of a stable on-chip fluorescent reference source would be highly desirable in order to compensate for instrumental parame ...
Royal Soc Chemistry2014
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We demonstrate data storage on glass/silicon microfluidic devices fabricated using parylene-C as a bonding layer. In particular, we report intermediate parylene-C bonding layer fluorescence (iPBLF) and its use as an on-chip medium for data storage by dynam ...
Royal Society of Chemistry2013
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This work presents one of the first low power pH sensing microfluidic chip based on the heterogeneous integration of: (i) high-k FinFET sensors with liquid gate, (ii) miniaturized Ag/AgCl quasi-Reference Electrode and (iii) passive microfluidic. The integr ...
Ieee2016
Pressure lies at the basis of operation of most microfluidic systems, and is a determinant factor in the extent of miniaturization and in limiting the throughput and time constant of the microfluidic assays. Despite the apparent importance given to fluidic ...
EPFL2013
The term of optofluidics defines an emergent research field that combines microfluidics and optics. In many lab-on-a-chip applications, these two technologies are used in combining the microfluidics for sample delivery and optics for sensing and controllin ...
EPFL2012
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We present a novel image-based method to measure the on-chip microfluidic pressure and flow rate simultaneously by using the integrated optofluidic membrane interferometers (OMIs). The device was constructed with two layers of structured polydimethylsiloxa ...
American Institute of Physics2011
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We introduce a new low-temperature (280 °C) parylene-to-SiO2 bonding process with high device yield (>90%) for the fabrication and integration of high-pressure-rated microfluidic chips. Pull tests demonstrate a parylene-to-SiO2 bonding strength of 10 ± 3 M ...
