An amorphous silicon photodiode array for glass-based optical MEMS application
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We have designed a wafer level chip scale package for a bi-stable SOI-MEMS dc switch using a silicon-glass hermetic seal with through the lid feedthroughs. Bonded at 365 °C, 230 V and 250 kg, they pass the fine/gross leak test after thermal cycling and mec ...
A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post-process compatible with the integrated circuit t ...
This paper presents a new electronic methodology to detect DNA hybridization for rapid identification of diseases, as well as food and environmental monitoring on a genetic base. The proposed solution exploits a new (electrical) capacitive measurement circ ...
We present the experimental results obtained with a novel monolithic silicon pixel detector which consists in depositing a n-i-p hydrogenated amorphous silicon (a-Si:H) diode straight above the readout ASIC (this technology is called Thin Film on ASIC, TFA ...
A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post process compatible to the integrated circuit tec ...
This paper reports on the encapsulation of a piezoresistive silicon/Pyrex liquid flow sensor using metal to glass anodic bonding. The bonding technique allowed integrating robust metallic microfluidic interconnects and eliminating the use of glue and O-rin ...
In the past decade, substrate noise has had a constant and significant impact on the design of analog and mixed-signal integrated circuits. Only recently, with advances in chip miniaturization and innovative circuit design, has substrate noise begun to pla ...
Batch and continuous-flow measurements of codeine were performed by electrochemiluminescence, using a miniaturized sensor combining transduction electrodes and a photodetector on the same silicon chip. In the case of flow measurements, a flow channel was a ...
We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are pr ...
With advances in micromachining and the consequent growing sophistication of microstructures, emphasis is increasingly being laid on the design and realization of complete microsystems. In this paper we will show some possible combinations of micromaching ...